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EN 60204-33:2011 Standard

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  Keywords:

#equipment #manufacture #part #machines #electrical

  Directive

Machinery (MD) Directive (2006/42/EC)

  Last Official Journal reference

Wednesday 13th of August 2025

  Description:

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

  Purpose

This part of IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

  Publication

Friday 18th of November 2011

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